Effects of gate oxide deposition methods on excimer laser crystallized poly-Si thin film transistors

BD van Dijk, GJ Bertens, R Ishihara

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationEuroDisplay '99: proceedings
Place of PublicationBerlin
PublisherVDE
Pages335-338
Number of pages4
ISBN (Print)3-8007-2478-2
Publication statusPublished - 1999
Event19th International Display Research Conference, Berlin - Berlin
Duration: 6 Sep 19999 Sep 1999

Publication series

Name
PublisherVDE

Conference

Conference19th International Display Research Conference, Berlin
Period6/09/999/09/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this