Effects of Mo/Si multilayer coatings on the imaging characteristics of an extreme-ultraviolet lithography system

NJ Duddles

Research output: Contribution to journalArticleScientific

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)3533-3538
Number of pages6
JournalApplied Optics
Volume37
Issue number16
Publication statusPublished - 1998

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