Effects of Mo/Si multilayer coatings on the imaging characteristics of an extreme-ultraviolet lithography system

NJ Duddles

Research output: Contribution to journal › Article › Scientific

ISSN: 00036935

Cite this

@article{fb6400ebd8ee4071a2f792cf5c2b0716,

title = "Effects of Mo/Si multilayer coatings on the imaging characteristics of an extreme-ultraviolet lithography system",

author = "NJ Duddles",

note = "ISSN: 00036935",

year = "1998",

language = "Undefined/Unknown",

volume = "37",

pages = "3533--3538",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "16",

}