Efficient residual stress identification approach for MEMS using modal information

INIS

• residual stresses 100%
• information 100%
• assessments 66%
• membranes 33%
• dynamics 33%
• production 33%
• evaluation 33%
• optimization 33%
• interpolation 33%
• amplitudes 33%
• nondestructive testing 33%
• data 33%
• algorithms 33%

Engineering

• Residual Stress 100%
• Micro-Electro-Mechanical System 100%
• Optimization 33%
• Models 33%
• Production Process 33%
• Stress State 33%
• Stress Field 33%
• Non-Destructive Testing 33%
• Experimental Stress 33%

Chemical Engineering

• Microelectromechanical System 100%