Elastic deformation of silicon (001) wafers due to thin film stresses

GCAM Janssen, BR Pujada Bermudez

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)121913-1-121913-3
    JournalApplied Physics Letters
    Volume91
    Publication statusPublished - 2007

    Keywords

    • CWTS JFIS >= 2.00

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