@article{04313133674c4bfab2e63e578fcd399e,
title = "Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes",
author = "L Shi and S Nihtianov and S Xia and LK Nanver and A Gottwald and F Scholze",
note = "Harvest Article number: 6163408",
year = "2012",
doi = "10.1109/TIM.2012.2187029",
language = "English",
volume = "61",
pages = "1268--1277",
journal = "IEEE Transactions on Instrumentation and Measurement",
issn = "0018-9456",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "5",
}