Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes

L Shi, S Nihtianov, S Xia, LK Nanver, A Gottwald, F Scholze

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)1268-1277
Number of pages10
JournalIEEE Transactions on Instrumentation and Measurement
Issue number5
Publication statusPublished - 2012

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