Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films

TMH Pham, T Akkaya, CR de Boer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)451-454
Number of pages4
JournalMaterials Science Forum
Volume433/436
Publication statusPublished - 2003

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS JFIS < 1.00

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