Electrical Characterization of PVD Aluminum Nitride Deposited on Silicon

L La Spina; S Panwar; H Schellevis; LK Nanver

Electrical Characterization of PVD Aluminum Nitride Deposited on Silicon

L La Spina, S Panwar, H Schellevis, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
Editors	s.n
Place of Publication	Veldhoven, The Netherlands
Publisher	s.l.
Pages	470-474
Number of pages	5
ISBN (Print)	90-73461-44-8
Publication status	Published - 2006
Event	9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors - Veldhoven, The Netherlands Duration: 23 Nov 2006 → 24 Nov 2006

Publication series

Name
Publisher	s.l.

Conference

Conference	9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
Period	23/11/06 → 24/11/06

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{2d5db839c64c4e2aa68eb6be4c6286b7,

title = "Electrical Characterization of PVD Aluminum Nitride Deposited on Silicon",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{La Spina}, L and S Panwar and H Schellevis and LK Nanver",

year = "2006",

language = "Undefined/Unknown",

isbn = "90-73461-44-8",

publisher = "s.l.",

pages = "470--474",

editor = "s.n",

booktitle = "Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",

note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors ; Conference date: 23-11-2006 Through 24-11-2006",

}

La Spina, L, Panwar, S, Schellevis, H & Nanver, LK 2006, Electrical Characterization of PVD Aluminum Nitride Deposited on Silicon. in s.n (ed.), Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. s.l., Veldhoven, The Netherlands, pp. 470-474, 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 23/11/06.

Electrical Characterization of PVD Aluminum Nitride Deposited on Silicon. / La Spina, L; Panwar, S; Schellevis, H et al.
Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. ed. / s.n. Veldhoven, The Netherlands: s.l., 2006. p. 470-474.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electrical Characterization of PVD Aluminum Nitride Deposited on Silicon

AU - La Spina, L

AU - Panwar, S

AU - Schellevis, H

AU - Nanver, LK

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-44-8

SP - 470

EP - 474

BT - Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors

A2 - s.n, null

PB - s.l.

CY - Veldhoven, The Netherlands

T2 - 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors

Y2 - 23 November 2006 through 24 November 2006

ER -