Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication

V Gonda; S Liu; TLM Scholtes; LK Nanver

Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication

V Gonda, S Liu, TLM Scholtes, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Material Research Society Symposium Proceedings (912, Warrendale, PA)
Editors	BJ Pawlak
Place of Publication	San Francisco, USA
Publisher	Material Research Society
Pages	-
Publication status	Published - 2006
Event	MRS Spring Meeting - San Francisco, USA Duration: 17 Apr 2006 → 21 Apr 2006

Publication series

Name
Publisher	Material Research Society

Conference

Conference	MRS Spring Meeting
Period	17/04/06 → 21/04/06

Bibliographical note

page: 0912-C05-02, isbn: 978-1-55899-868-1

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Gonda, V ; Liu, S ; Scholtes, TLM et al. / Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication. Material Research Society Symposium Proceedings (912, Warrendale, PA). editor / BJ Pawlak. San Francisco, USA : Material Research Society, 2006. pp. -

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title = "Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "V Gonda and S Liu and TLM Scholtes and LK Nanver",

note = "page: 0912-C05-02, isbn: 978-1-55899-868-1; MRS Spring Meeting ; Conference date: 17-04-2006 Through 21-04-2006",

year = "2006",

language = "Undefined/Unknown",

publisher = "Material Research Society",

pages = "--",

editor = "BJ Pawlak",

booktitle = "Material Research Society Symposium Proceedings (912, Warrendale, PA)",

}

Gonda, V, Liu, S, Scholtes, TLM & Nanver, LK 2006, Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication. in BJ Pawlak (ed.), Material Research Society Symposium Proceedings (912, Warrendale, PA). Material Research Society, San Francisco, USA, pp. -, MRS Spring Meeting, 17/04/06.

Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication. / Gonda, V; Liu, S; Scholtes, TLM et al.
Material Research Society Symposium Proceedings (912, Warrendale, PA). ed. / BJ Pawlak. San Francisco, USA: Material Research Society, 2006. p. -.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication

AU - Gonda, V

AU - Liu, S

AU - Scholtes, TLM

AU - Nanver, LK

N1 - page: 0912-C05-02, isbn: 978-1-55899-868-1

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - -

BT - Material Research Society Symposium Proceedings (912, Warrendale, PA)

A2 - Pawlak, BJ

PB - Material Research Society

CY - San Francisco, USA

T2 - MRS Spring Meeting

Y2 - 17 April 2006 through 21 April 2006

ER -

Gonda V, Liu S, Scholtes TLM, Nanver LK. Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication. In Pawlak BJ, editor, Material Research Society Symposium Proceedings (912, Warrendale, PA). San Francisco, USA: Material Research Society. 2006. p. -