Electrical characterization of silicon diodes formed by laser annealing of implanted dopants

LK Nanver, JHCM Slabbekoorn, A Burtsev, TLM Scholtes, R Surdeanu, F Simonetti, HJ Kalhert, JW Slotboom

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationAdvanced short-time thermal processing for Si-based CMOS devices
EditorsF Roozeboom, E Gusev, LJ Chen, MC Ozturk, DL Kwong, PJ Timans
Place of PublicationPennington, USA
PublisherThe Electrochemical Society
Number of pages12
ISBN (Print)1-56677-396-2
Publication statusPublished - 2003
EventThe 203rd ECS meeting, Paris, France - Pennington, USA
Duration: 27 Apr 20032 May 2003

Publication series

PublisherThe Electrochemical Society


ConferenceThe 203rd ECS meeting, Paris, France


  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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