@inproceedings{72b7db370d33473a81afff405fb55a62,
title = "Electrical characterization of silicon nitride and silicon carbide CVD layers as passivation on high resistivity silicon substrates",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "P Andricciola and {Ir. Evseev}, SB and S Milosavljevic and LK Nanver",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44-8",
publisher = "s.l.",
pages = "408--411",
editor = "s.n.",
booktitle = "Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",
note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors ; Conference date: 23-11-2006 Through 24-11-2006",
}