Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C

M Mihailovic, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010
Editors	P French et al
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	114-117
Number of pages	4
Publication status	Published - 2010
Event	13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands - Utrecht, The Netherlands Duration: 18 Nov 2010 → 19 Nov 2010

Name
Publisher	STW

Conference	13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands
Period	18/11/10 → 19/11/10

Keywords

@inproceedings{ec17d85b93d24629aa169f9cdd6f87f1,

title = "Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C",

keywords = "Conf.proc. > 3 pag",

author = "M Mihailovic and JF Creemer and PM Sarro",

year = "2010",

language = "English",

publisher = "STW",

pages = "114--117",

editor = "{French et al}, P",

booktitle = "Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010",

note = "13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands ; Conference date: 18-11-2010 Through 19-11-2010",

}

Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C. / Mihailovic, M; Creemer, JF; Sarro, PM.
Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. ed. / P French et al. Utrecht, The Netherlands: STW, 2010. p. 114-117.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C

AU - Mihailovic, M

AU - Creemer, JF

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 114

EP - 117

BT - Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010

A2 - French et al, P

PB - STW

CY - Utrecht, The Netherlands

T2 - 13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands

Y2 - 18 November 2010 through 19 November 2010

ER -