Electrical detection and simulation of stress in silicon nitride spacer technology

HW van Zeijl, S Mijalkovic, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	3rd International Conference on Materials for Microelectronics: proceedings
Place of Publication	London
Publisher	IOM communications
Pages	231-234
Number of pages	4
ISBN (Print)	1-86125-129-7
Publication status	Published - 2000
Event	3rd International Conference on Materials for Microelectronics, Dublin Castle - London Duration: 16 Oct 2000 → 17 Oct 2000

Name
Publisher	IOM Communications

Conference	3rd International Conference on Materials for Microelectronics, Dublin Castle
Period	16/10/00 → 17/10/00

Keywords

@inproceedings{ca714eafbcaa40da9ad9b04a175e126b,

title = "Electrical detection and simulation of stress in silicon nitride spacer technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Zeijl}, HW and S Mijalkovic and LK Nanver",

year = "2000",

language = "Undefined/Unknown",

isbn = "1-86125-129-7",

publisher = "IOM communications",

pages = "231--234",

booktitle = "3rd International Conference on Materials for Microelectronics: proceedings",

address = "United Kingdom",

note = "3rd International Conference on Materials for Microelectronics, Dublin Castle ; Conference date: 16-10-2000 Through 17-10-2000",

}

Electrical detection and simulation of stress in silicon nitride spacer technology. / van Zeijl, HW; Mijalkovic, S; Nanver, LK.
3rd International Conference on Materials for Microelectronics: proceedings. London: IOM communications, 2000. p. 231-234.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electrical detection and simulation of stress in silicon nitride spacer technology

AU - van Zeijl, HW

AU - Mijalkovic, S

AU - Nanver, LK

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-86125-129-7

SP - 231

EP - 234

BT - 3rd International Conference on Materials for Microelectronics: proceedings

PB - IOM communications

CY - London

T2 - 3rd International Conference on Materials for Microelectronics, Dublin Castle

Y2 - 16 October 2000 through 17 October 2000

ER -