Electrical detection and simulation of stress in silicon nitride spacer technology

HW van Zeijl, S Mijalkovic, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)339-341
Number of pages3
JournalJournal of Materials Science: Materials in Electronics
Volume12
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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