Electrical detection and simulation of stress in silicon nitride spacer technology

HW van Zeijl, S Mijalkovic, LK Nanver

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	339-341
Number of pages	3
Journal	Journal of Materials Science: Materials in Electronics
Volume	12
Publication status	Published - 2001

Keywords

@article{6a2ce2ea9e71456e80cece7aba56b524,

title = "Electrical detection and simulation of stress in silicon nitride spacer technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Zeijl}, HW and S Mijalkovic and LK Nanver",

year = "2001",

language = "Undefined/Unknown",

volume = "12",

pages = "339--341",

journal = "Journal of Materials Science: Materials in Electronics",

issn = "0957-4522",

publisher = "Springer",

}

TY - JOUR

T1 - Electrical detection and simulation of stress in silicon nitride spacer technology

AU - van Zeijl, HW

AU - Mijalkovic, S

AU - Nanver, LK

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0957-4522

VL - 12

SP - 339

EP - 341

JO - Journal of Materials Science: Materials in Electronics

JF - Journal of Materials Science: Materials in Electronics

ER -