Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency

L Shi, LK Nanver, C Laubis, F Scholze, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings 16th International Conference on Solid-State Sensors, Actuators and Microsystems
EditorsM Esashi et al., Z Zhou
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages48-51
Number of pages4
ISBN (Print)978-1-4577-0156-6
DOIs
Publication statusPublished - 2011
EventTransducers 2011 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2011
Period5/06/119/06/11

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