@inproceedings{ff38c53345b240649bcbbd30ab32ae3e,
title = "Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency",
author = "L Shi and LK Nanver and C Laubis and F Scholze and S Nihtianov",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969130",
language = "English",
isbn = "978-1-4577-0156-6",
publisher = "IEEE",
pages = "48--51",
editor = "{Esashi et al.}, M and Z Zhou",
booktitle = "Proceedings 16th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
note = "Transducers 2011 ; Conference date: 05-06-2011 Through 09-06-2011",
}