Electrical properties of WGex contacts on Ti adhesion layers

PFM Verhoeven; TGM Oosterflaken; JF Jongste; O Demolliens; GCAM Janssen; S Radelaar

Electrical properties of WGex contacts on Ti adhesion layers

PFM Verhoeven, TGM Oosterflaken, JF Jongste, O Demolliens, GCAM Janssen, S Radelaar

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Advanced Metallization and Interconnect Systems for ULSI Applications in 1995
Editors	RC Ellwanger, Shi-Qing Wang
Place of Publication	Pittsburgh, USA
Publisher	Material Research Society
Pages	575-579
Number of pages	5
Publication status	Published - 1996

Publication series

Name
Publisher	Material Research Society

Cite this

@inproceedings{1b44aa95aecc40f6b578786ebaed4f1a,

title = "Electrical properties of WGex contacts on Ti adhesion layers",

author = "PFM Verhoeven and TGM Oosterflaken and JF Jongste and O Demolliens and GCAM Janssen and S Radelaar",

year = "1996",

language = "English",

publisher = "Material Research Society",

pages = "575--579",

editor = "RC Ellwanger and Shi-Qing Wang",

booktitle = "Advanced Metallization and Interconnect Systems for ULSI Applications in 1995",

}

Electrical properties of WGex contacts on Ti adhesion layers. / Verhoeven, PFM; Oosterflaken, TGM; Jongste, JF et al.
Advanced Metallization and Interconnect Systems for ULSI Applications in 1995. ed. / RC Ellwanger; Shi-Qing Wang. Pittsburgh, USA: Material Research Society, 1996. p. 575-579.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electrical properties of WGex contacts on Ti adhesion layers

AU - Verhoeven, PFM

AU - Oosterflaken, TGM

AU - Jongste, JF

AU - Demolliens, O

AU - Janssen, GCAM

AU - Radelaar, S

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 575

EP - 579

BT - Advanced Metallization and Interconnect Systems for ULSI Applications in 1995

A2 - Ellwanger, RC

A2 - Wang, Shi-Qing

PB - Material Research Society

CY - Pittsburgh, USA

ER -