Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures

LA Machado da Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEUROSENSORS 17th European conference of solid-state transducers
Editors s.n.
Place of PublicationGuimarães
PublisherUniversity of Minho
Pages68-71
Number of pages4
ISBN (Print)972-98603-1-9
Publication statusPublished - 2003
Event17th Eropean conference on solid-state transducers, Guimarães, Portugal - Guimarães
Duration: 21 Sept 200324 Sept 2003

Publication series

Name
PublisherUniversity of Minho

Conference

Conference17th Eropean conference on solid-state transducers, Guimarães, Portugal
Period21/09/0324/09/03

Keywords

  • Conf.proc. > 3 pag

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