Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures

LA Machado da Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	EUROSENSORS 17th European conference of solid-state transducers
Editors	s.n.
Place of Publication	Guimarães
Publisher	University of Minho
Pages	68-71
Number of pages	4
ISBN (Print)	972-98603-1-9
Publication status	Published - 2003
Event	17th Eropean conference on solid-state transducers, Guimarães, Portugal - Guimarães Duration: 21 Sept 2003 → 24 Sept 2003

Name
Publisher	University of Minho

Conference	17th Eropean conference on solid-state transducers, Guimarães, Portugal
Period	21/09/03 → 24/09/03

Keywords

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title = "Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures",

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author = "{Machado da Rocha}, LA and E Cretu and RF Wolffenbuttel",

year = "2003",

language = "Undefined/Unknown",

isbn = "972-98603-1-9",

publisher = "University of Minho",

pages = "68--71",

editor = "s.n.",

booktitle = "EUROSENSORS 17th European conference of solid-state transducers",

note = "17th Eropean conference on solid-state transducers, Guimar{\~a}es, Portugal ; Conference date: 21-09-2003 Through 24-09-2003",

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Machado da Rocha, LA, Cretu, E & Wolffenbuttel, RF 2003, Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures. in s.n. (ed.), EUROSENSORS 17th European conference of solid-state transducers. University of Minho, Guimarães, pp. 68-71, 17th Eropean conference on solid-state transducers, Guimarães, Portugal, 21/09/03.

Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures. / Machado da Rocha, LA; Cretu, E; Wolffenbuttel, RF.
EUROSENSORS 17th European conference of solid-state transducers. ed. / s.n. Guimarães: University of Minho, 2003. p. 68-71.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures

AU - Machado da Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 972-98603-1-9

SP - 68

EP - 71

BT - EUROSENSORS 17th European conference of solid-state transducers

A2 - s.n., null

PB - University of Minho

CY - Guimarães

T2 - 17th Eropean conference on solid-state transducers, Guimarães, Portugal

Y2 - 21 September 2003 through 24 September 2003

ER -