Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

L Mele; T Rossi; M Riccio; E Iervolino; F Santagata; A Irace; G Breglio; JF Creemer; PM Sarro

doi:10.1016/j.proeng.2011.12.096

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

L Mele, T Rossi, M Riccio, E Iervolino, F Santagata, A Irace, G Breglio, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

20 Citations (Scopus)

Original language	English
Title of host publication	Proceedings Eurosensors XXV
Editors	C Tsamis, G Kaltas
Place of Publication	Athens, Greece
Publisher	Elsevier
Pages	387-390
Number of pages	4
DOIs	https://doi.org/10.1016/j.proeng.2011.12.096
Publication status	Published - 2011
Event	Eurosensors XXV - Athens, Greece Duration: 4 Sept 2011 → 7 Sept 2011

Publication series

Name
Publisher	Elsevier

Name	Procedia Engineering
Volume	25
ISSN (Print)	1877-7058

Conference

Conference	Eurosensors XXV
Period	4/09/11 → 7/09/11

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Access to Document

10.1016/j.proeng.2011.12.096

Cite this

Mele, L., Rossi, T., Riccio, M., Iervolino, E., Santagata, F., Irace, A., Breglio, G., Creemer, JF., & Sarro, PM. (2011). Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity. In C. Tsamis, & G. Kaltas (Eds.), Proceedings Eurosensors XXV (pp. 387-390). (Procedia Engineering; Vol. 25). Elsevier. https://doi.org/10.1016/j.proeng.2011.12.096

@inproceedings{caa653ebb805475e800418dece15a2d8,

title = "Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Mele and T Rossi and M Riccio and E Iervolino and F Santagata and A Irace and G Breglio and JF Creemer and PM Sarro",

year = "2011",

doi = "10.1016/j.proeng.2011.12.096",

language = "English",

publisher = "Elsevier",

pages = "387--390",

editor = "C Tsamis and G Kaltas",

booktitle = "Proceedings Eurosensors XXV",

note = "Eurosensors XXV ; Conference date: 04-09-2011 Through 07-09-2011",

}

Mele, L, Rossi, T, Riccio, M, Iervolino, E, Santagata, F, Irace, A, Breglio, G, Creemer, JF & Sarro, PM 2011, Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity. in C Tsamis & G Kaltas (eds), Proceedings Eurosensors XXV. Procedia Engineering, vol. 25, Elsevier, Athens, Greece, pp. 387-390, Eurosensors XXV, 4/09/11. https://doi.org/10.1016/j.proeng.2011.12.096

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity. / Mele, L; Rossi, T; Riccio, M et al.
Proceedings Eurosensors XXV. ed. / C Tsamis; G Kaltas. Athens, Greece: Elsevier, 2011. p. 387-390 (Procedia Engineering; Vol. 25).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

AU - Mele, L

AU - Rossi, T

AU - Riccio, M

AU - Iervolino, E

AU - Santagata, F

AU - Irace, A

AU - Breglio, G

AU - Creemer, JF

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1016/j.proeng.2011.12.096

DO - 10.1016/j.proeng.2011.12.096

M3 - Conference contribution

SP - 387

EP - 390

BT - Proceedings Eurosensors XXV

A2 - Tsamis, C

A2 - Kaltas, G

PB - Elsevier

CY - Athens, Greece

T2 - Eurosensors XXV

Y2 - 4 September 2011 through 7 September 2011

ER -