Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]

CMA Ashruf, PJ French, PM Sarro, JJ Kelly, PMMC Bressers

Research output: Contribution to journalArticleScientific

Original languageUndefined/Unknown
Pages (from-to)595-612
Number of pages18
JournalMechatronics
Volume1998
Issue number8
Publication statusPublished - 1998

Keywords

  • ZX Int.klas.verslagjaar < 2002

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