@inproceedings{f4b01576d94f42d3bc8f558f76f3d5fe,
title = "Electrochemical etching for n-type silicon using a novel etchant",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "S Izuo and H Ohji and PJ French and K Tsutsumi",
year = "2001",
language = "Undefined/Unknown",
isbn = "3-540-42150-5",
publisher = "Springer",
pages = "1--4",
editor = "{E Obermeier}",
booktitle = "Transducers'01: technical papers. Vol. 1/2",
note = "11th International Conference on Solid-State Sensors and Actuators, Munich ; Conference date: 10-06-2001 Through 14-06-2001",
}