Original language | Undefined/Unknown |
---|---|
Title of host publication | MRS Symp. Proc. Materials Reliability in Microelectronics VII |
Editors | J Clement, R Keller, K Krisch, J Sanchez, Z Suo |
Pages | 255-266 |
Number of pages | 12 |
Publication status | Published - 1997 |
Electromigration in short Al lines studied by high-resolution resistance measurement
AH Verbruggen, MJC van de Homberg, LC Jacobs, AJ Kalkman, JR Kraayeveld, S Radelaar
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
3
Citations
(Scopus)