Electron beam exposure system

MJJ Wieland (Inventor), AHV van Veen (Inventor), BJ Kampherbeek (Inventor), P Kruit (Inventor)

    Research output: Patent

    Filter
    Patent

    Search results

    • 2005

      Electron beam exposure system

      Wieland, M., Kampherbeek, B., van Veen, A. & Kruit, P., 2005, IPC No. A61N, H01L, B82Y, H01J, G03B, G03F, G01Q, Patent No. US 6897458 B2, Priority date 30 Oct 2002

      Research output: Patent