Electron beam induced deposition and in-situ inspection of sub-10 nm structures

MJ van Bruggen, WF van Dorp, B van Someren, N Silvis-Cividjian, CW Hagen, P Kruit

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the 13th Eurepean Microscopy Congress
    Pages175-176
    Number of pages2
    Publication statusPublished - 2004

    Publication series

    Name
    Name
    VolumeII

    Keywords

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