Electron beam induced deposition and in-situ inspection of sub-10 nm structures

MJ van Bruggen, WF van Dorp, B van Someren, N Silvis-Cividjian, CW Hagen, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 13th Eurepean Microscopy Congress
Pages	175-176
Number of pages	2
Publication status	Published - 2004

Name

Name
Volume	II

Niet eerder opgenomen

Keywords

@inproceedings{ae2fa744064542588f82a133b0c179c4,

title = "Electron beam induced deposition and in-situ inspection of sub-10 nm structures",

keywords = "Geen BTA classificatie",

author = "{van Bruggen}, MJ and {van Dorp}, WF and {van Someren}, B and N Silvis-Cividjian and CW Hagen and P Kruit",

note = "Niet eerder opgenomen",

year = "2004",

language = "Undefined/Unknown",

pages = "175--176",

booktitle = "Proceedings of the 13th Eurepean Microscopy Congress",

}

TY - GEN

T1 - Electron beam induced deposition and in-situ inspection of sub-10 nm structures

AU - van Bruggen, MJ

AU - van Dorp, WF

AU - van Someren, B

AU - Silvis-Cividjian, N

AU - Hagen, CW

AU - Kruit, P

N1 - Niet eerder opgenomen

PY - 2004

Y1 - 2004

KW - Geen BTA classificatie

M3 - Conference contribution

SP - 175

EP - 176

BT - Proceedings of the 13th Eurepean Microscopy Congress

ER -