Electron-beam-induced deposition of platinum at very low landing energies

APJM Botman, DAM de Winter, JJL Mulders

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2460-2463
Number of pages4
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume26
Issue number6
Publication statusPublished - 2008

Keywords

  • CWTS 0.75 <= JFIS < 2.00

Cite this