Electron-beam-induced deposition of platinum at very low landing energies

APJM Botman, DAM de Winter, JJL Mulders

    Research output: Contribution to journalArticleScientificpeer-review

    31 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2460-2463
    Number of pages4
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume26
    Issue number6
    Publication statusPublished - 2008

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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