Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si

J.C. van Oven, F Berwald, KK Berggren, P Kruit, CW Hagen

    Research output: Contribution to journalArticleScientificpeer-review

    41 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1-6
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume29
    Issue number6
    DOIs
    Publication statusPublished - 2011

    Keywords

    • academic journal papers
    • CWTS JFIS < 0.75

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