Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si

J.C. van Oven, F Berwald, KK Berggren, P Kruit, CW Hagen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-6
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	29
Issue number	6
DOIs	https://doi.org/10.1116/1.3640743
Publication status	Published - 2011

Keywords

@article{36999ebd114e4c0c8b5e68db0bd2ed73,

title = "Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si",

keywords = "academic journal papers, CWTS JFIS < 0.75",

author = "{van Oven}, J.C. and F Berwald and KK Berggren and P Kruit and CW Hagen",

year = "2011",

doi = "10.1116/1.3640743",

language = "Undefined/Unknown",

volume = "29",

pages = "1--6",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si

AU - van Oven, J.C.

AU - Berwald, F

AU - Berggren, KK

AU - Kruit, P

AU - Hagen, CW

PY - 2011

Y1 - 2011

KW - academic journal papers

KW - CWTS JFIS < 0.75

U2 - 10.1116/1.3640743

DO - 10.1116/1.3640743

M3 - Article

SN - 1071-1023

VL - 29

SP - 1

EP - 6

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -