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Electron beam technology for single nanometer fabrication
Marijke Scotuzzi
Research output
:
Thesis
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Dissertation (TU Delft)
63
Downloads (Pure)
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Dive into the research topics of 'Electron beam technology for single nanometer fabrication'. Together they form a unique fingerprint.
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INIS
manufacturing
100%
fabrication
100%
polymers
100%
devices
100%
electron beams
100%
production
66%
substrates
66%
resolution
66%
wavelengths
33%
dimensions
33%
range
33%
ultraviolet radiation
33%
volume
33%
cost
33%
integrated circuits
33%
etching
33%
industry
33%
resist
33%
nanotechnology
33%
deposition
33%
Engineering
Electron Beam Technology
100%
Nanometre
100%
Gas Fuel Manufacture
50%
Substrates
50%
Integrated Circuit
25%
Throughput
25%
Critical Dimension
25%
Patterning Technique
25%
High Volume
25%
Wavelength
25%
Etching Process
25%
Material Science
Nanoimprint Lithography
100%
Devices
75%
Shrinkage
25%
Extreme-Ultraviolet Lithography
25%
Electronic Circuit
25%
Lithography
25%