Electron optical device for low-energy foil aberration correction, verleend

P Kruit (Inventor), RH van Aken (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberWO 2004/021391 A1
    IPCaanvrager: TUD en FOM OCT-02-011
    Priority date11/03/04
    Publication statusPublished - 2004

    Bibliographical note

    aanvrager: TUD en FOM OCT-02-011

    Keywords

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