Electron optics of microlenses with inclined beams

Y Zhang, JE Barth, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)655-660
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume26
    Issue number2
    Publication statusPublished - 2008

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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