Electron optics of skewed micro-Einzel lenses

MJ van Bruggen, B van Someren, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	139-147
Number of pages	9
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	27(1)
Issue number	Jan/Feb
Publication status	Published - 2009

Keywords

@article{438405b841044be3a19b9961b1101e98,

title = "Electron optics of skewed micro-Einzel lenses",

keywords = "CWTS JFIS < 0.75",

author = "{van Bruggen}, MJ and {van Someren}, B and P Kruit",

year = "2009",

language = "Undefined/Unknown",

volume = "27(1)",

pages = "139--147",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "Jan/Feb",

}

TY - JOUR

T1 - Electron optics of skewed micro-Einzel lenses

AU - van Bruggen, MJ

AU - van Someren, B

AU - Kruit, P

PY - 2009

Y1 - 2009

KW - CWTS JFIS < 0.75

M3 - Article

SN - 1071-1023

VL - 27(1)

SP - 139

EP - 147

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - Jan/Feb

ER -