Electrostatic rotator for alignment purposes in multi electron beam systems

AC Zonnevylle, CTH Heerkens, P Kruit, ML Wieland, FM Postma, SWHK Steenbrink

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)1095-1099
Number of pages5
JournalMicroelectronic Engineering
Volume87
Issue number5-8
Publication statusPublished - 2010

Keywords

  • CWTS JFIS < 0.75

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