Electrostatic rotator for alignment purposes in multi electron beam systems

AC Zonnevylle, CTH Heerkens, P Kruit, ML Wieland, FM Postma, SWHK Steenbrink

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1095-1099
Number of pages	5
Journal	Microelectronic Engineering
Volume	87
Issue number	5-8
Publication status	Published - 2010

Also on line 'science direct'

Keywords

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title = "Electrostatic rotator for alignment purposes in multi electron beam systems",

keywords = "CWTS JFIS < 0.75",

author = "AC Zonnevylle and CTH Heerkens and P Kruit and ML Wieland and FM Postma and SWHK Steenbrink",

note = "Also on line 'science direct'",

year = "2010",

language = "English",

volume = "87",

pages = "1095--1099",

journal = "Microelectronic Engineering",

issn = "0167-9317",

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TY - JOUR

T1 - Electrostatic rotator for alignment purposes in multi electron beam systems

AU - Zonnevylle, AC

AU - Heerkens, CTH

AU - Kruit, P

AU - Wieland, ML

AU - Postma, FM

AU - Steenbrink, SWHK

N1 - Also on line 'science direct'

PY - 2010

Y1 - 2010

KW - CWTS JFIS < 0.75

M3 - Article

SN - 0167-9317

VL - 87

SP - 1095

EP - 1099

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -