Electrostatically Squeezed Elastometers for Out-Of-Plane Microactuation

This paper presents a novel design concept to actuate elastomers using comb-like interconnects and vertically standing electrodes of small width, with the capability of generating out-of-plane displacements. The motion characteristic of the actuators is studied using analytical and finite element methods. It leads to design of short electrodes that restricts the elastomers less. Fabrication of the design is attempted with a good result of elastomer filling of submicron trenches. It promises generating high energy density at moderate driving voltage, compared with air-gap electrostatic actuators.