Electrostatically Squeezed Elastometers for Out-Of-Plane Microactuation

GK Lau, JFL Goosen, F van Keulen, T Chu Duc, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


This paper presents a novel design concept to actuate elastomers using comb-like interconnects and vertically standing electrodes of small width, with the capability of generating out-of-plane displacements. The motion characteristic of the actuators is studied using analytical and finite element methods. It leads to design of short electrodes that restricts the elastomers less. Fabrication of the design is attempted with a good result of elastomer filling of submicron trenches. It promises generating high energy density at moderate driving voltage, compared with air-gap electrostatic actuators.
Original languageUndefined/Unknown
Title of host publicationProceedings Asia-Pacific Conference of Transducers and Micro-Nano Technology
Editors Liu, A.Q., White, T.
Place of PublicationSingapore
Number of pages4
Publication statusPublished - 2006
EventAsia-Pacific Conference of Transducers and Micro-Nano Technology - Singapore
Duration: 25 Jun 200628 Jun 2006

Publication series



ConferenceAsia-Pacific Conference of Transducers and Micro-Nano Technology


  • conference contrib. refereed
  • Conf.proc. > 3 pag

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