Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 1546-1555 |
Number of pages | 10 |
Journal | IEEE Journal of Microelectromechanical Systems |
Volume | 17 |
Issue number | 6 |
Publication status | Published - 2008 |
Keywords
- CWTS JFIS >= 2.00
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 1546-1555 |
Number of pages | 10 |
Journal | IEEE Journal of Microelectromechanical Systems |
Volume | 17 |
Issue number | 6 |
Publication status | Published - 2008 |