Energy density window for location controlled Si grains by dual-beam excimer laser

Research output: Contribution to journal › Article › Scientific › peer-review

wet 5

Keywords

@article{5b93f405882d40f3b9a37d03bcef95e2,

title = "Energy density window for location controlled Si grains by dual-beam excimer laser",

keywords = "Elektrotechniek, Techniek, ZX CWTS JFIS < 1.00",

author = "A Burtsev and R Ishihara and CIM Beenakker",

note = "wet 5",

year = "2002",

language = "Undefined/Unknown",

volume = "419",

pages = "199--206",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}