Energy transport in plasma etching of nanoporous dielectric materials

JL Plawsky, S Ponoth, G Dalakos, K Malek, MO Coppens

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)195-204
    Number of pages10
    JournalSuperlattices and Microstructures
    Issue number3-6
    Publication statusPublished - 2004


    • professional journal papers
    • ZX CWTS JFIS < 1.00

    Cite this