Energy transport in plasma etching of nanoporous dielectric materials

JL Plawsky, S Ponoth, G Dalakos, K Malek, MO Coppens

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	195-204
Number of pages	10
Journal	Superlattices and Microstructures
Volume	35
Issue number	3-6
Publication status	Published - 2004

Keywords

@article{e27d58eb7c2b41678d7a6292fe8f2540,

title = "Energy transport in plasma etching of nanoporous dielectric materials",

keywords = "professional journal papers, ZX CWTS JFIS < 1.00",

author = "JL Plawsky and S Ponoth and G Dalakos and K Malek and MO Coppens",

year = "2004",

language = "Undefined/Unknown",

volume = "35",

pages = "195--204",

journal = "Superlattices and Microstructures",

issn = "0749-6036",

publisher = "Academic Press",

number = "3-6",

}

TY - JOUR

T1 - Energy transport in plasma etching of nanoporous dielectric materials

AU - Plawsky, JL

AU - Ponoth, S

AU - Dalakos, G

AU - Malek, K

AU - Coppens, MO

PY - 2004

Y1 - 2004

KW - professional journal papers

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0749-6036

VL - 35

SP - 195

EP - 204

JO - Superlattices and Microstructures

JF - Superlattices and Microstructures

IS - 3-6

ER -