Enlargement of location controlled Si grains by dual beam eximer-laser with bump structures

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Keywords

@article{f8a94f23e9374b9c9ec17315ebe3ef63,

title = "Enlargement of location controlled Si grains by dual beam eximer-laser with bump structures",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Burtsev and R Ishihara",

year = "2000",

language = "Undefined/Unknown",

pages = "152--158",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "154-155",

}