Environment induced failure modes of thin film resonators

R Kazinczi, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE. Vol. 4234
Editors AR Wilson, H Asanuma
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages1-11
Number of pages11
ISBN (Print)0-8194-3908-8
Publication statusPublished - 2000
EventSmart Materials, Melbourne - Bellingham
Duration: 13 Dec 200015 Dec 2000

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceSmart Materials, Melbourne
Period13/12/0015/12/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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