TY - JOUR
T1 - Equivalent Circuit Modeling of a Single-Ended Patch Sensing Element in Integrated Technology
AU - Thippur Shivamurthy, Harshita
AU - Hu, Zhebin
AU - Vlachogiannakis, Gerasimos
AU - Spirito, Marco
AU - Neto, Andrea
PY - 2020
Y1 - 2020
N2 - In this article, we present an analytical formulation based on an equivalent circuit model to support the challenging task of designing and analyzing single-ended patch sensing elements to be integrated in planar technologies. The proposed approach further allows for differentiating the permittivity values of the individual layers when sensing over dense and stratified mediums. The equivalent model of the sensing pixel is derived resorting to equivalence theorem and transmission-line theory. The relative impact of the material under test and the metal thickness of the sensing element is accurately included in the evaluation of the endpoint load of the radial transmission line, equivalent to the patch radius. This approach of representing the single-ended sensing element isolates the capacitance contributions associated with the patch radius, patch thickness, and the medium under test. The computationally fast tool is further utilized in absolute permittivity measurements using a 0.14- μm CMOS 2-D permittivity imaging matrix prototype operating from 100 MHz to 2.9 GHz, reporting excellent agreement with theoretical values.
AB - In this article, we present an analytical formulation based on an equivalent circuit model to support the challenging task of designing and analyzing single-ended patch sensing elements to be integrated in planar technologies. The proposed approach further allows for differentiating the permittivity values of the individual layers when sensing over dense and stratified mediums. The equivalent model of the sensing pixel is derived resorting to equivalence theorem and transmission-line theory. The relative impact of the material under test and the metal thickness of the sensing element is accurately included in the evaluation of the endpoint load of the radial transmission line, equivalent to the patch radius. This approach of representing the single-ended sensing element isolates the capacitance contributions associated with the patch radius, patch thickness, and the medium under test. The computationally fast tool is further utilized in absolute permittivity measurements using a 0.14- μm CMOS 2-D permittivity imaging matrix prototype operating from 100 MHz to 2.9 GHz, reporting excellent agreement with theoretical values.
KW - Equivalent transmission line model
KW - permittivity sensors
UR - http://www.scopus.com/inward/record.url?scp=85078231447&partnerID=8YFLogxK
U2 - 10.1109/TMTT.2019.2956938
DO - 10.1109/TMTT.2019.2956938
M3 - Article
AN - SCOPUS:85078231447
SN - 0018-9480
VL - 68
SP - 17
EP - 26
JO - IEEE Transactions on Microwave Theory and Techniques
JF - IEEE Transactions on Microwave Theory and Techniques
IS - 1
M1 - 8951227
ER -