Erosion rate change and surface roughening in Si during oblique O2+ bombardment with oxygen flooding

ZX Jiang, PFA Alkemade

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Name
Publisher	Wiley

Cite this

@inproceedings{f5e4426b67a24befa2ecd0f08b85616b,

title = "Erosion rate change and surface roughening in Si during oblique O2+ bombardment with oxygen flooding",

author = "ZX Jiang and PFA Alkemade",

year = "1998",

language = "Undefined/Unknown",

isbn = "0471978264",

publisher = "Wiley",

pages = "431--434",

editor = "G Gillen and R Lareau",

booktitle = "SIMS XI",

}