Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

P. Dirksen, JJM Braat, AJEM Janssen

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	013005-1-013005-11
Journal	Journal of Microlithography, Microfabrication, and Microsystems
Volume	5
Issue number	1
Publication status	Published - 2006

Keywords

@article{aa85679557b84b7182b17e8c3695b245,

title = "Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory",

keywords = "CWTS JFIS < 0.75",

author = "P. Dirksen and JJM Braat and AJEM Janssen",

year = "2006",

language = "Undefined/Unknown",

volume = "5",

pages = "013005--1--013005--11",

journal = "Journal of Microlithography, Microfabrication, and Microsystems",

issn = "1537-1646",

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}

TY - JOUR

T1 - Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

AU - Dirksen, P.

AU - Braat, JJM

AU - Janssen, AJEM

PY - 2006

Y1 - 2006

KW - CWTS JFIS < 0.75

M3 - Article

VL - 5

SP - 013005-1-013005-11

JO - Journal of Microlithography, Microfabrication, and Microsystems

JF - Journal of Microlithography, Microfabrication, and Microsystems

SN - 1537-1646

IS - 1

ER -