Estimation and control of large-scale systems with an application to adaptive optics for EUV lithography

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Verhaegen, M.H.G., Supervisor
Award date4 Feb 2014
Print ISBNs9789462035102
DOIs
Publication statusPublished - 2014

Keywords

  • Diss. prom. aan TU Delft

Cite this