@article{05662d965c584c898b14a6ab019b3d99,
title = "Etching and passivation of silicon in alkaline solution: a coupled chemical/electrochemical system",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "XH Xia and CMA Ashruf and PJ French and J Rappich and JJ Kelly",
year = "2001",
language = "Undefined/Unknown",
volume = "105",
pages = "5722--5729",
journal = "The Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter)",
issn = "1520-6106",
publisher = "American Chemical Society (ACS)",
}