Fingerprint
Dive into the research topics of 'EUV mask feature reconstruction via phase retrieval'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
EUV mask feature reconstruction via phase retrieval
Paolo Ansuinelli*, Wim Coene, Paul Urbach
*Corresponding author for this work
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3
Citations
(Scopus)
78
Downloads
(Pure)