EUV phase mask engineering based on image optimisation.

AM Nugrowati, AS van de Nes, SF Pereira, JJM Braat

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	684-687
Number of pages	4
Journal	Microelectronic Engineering
Volume	83
Publication status	Published - 2006

Keywords

@article{2583c0a634a14e11b32c88f6fd0670ed,

title = "EUV phase mask engineering based on image optimisation.",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "AM Nugrowati and {van de Nes}, AS and SF Pereira and JJM Braat",

year = "2006",

language = "Undefined/Unknown",

volume = "83",

pages = "684--687",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}