Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants

Alessandro S. Savoia; Domenico Giustiniano; Carlo Prelini; Marta Saccher; Amin Rashidi; Alberto Leotti; Vasiliki Giagka; Marco Ferrera

doi:10.1109/IUS51837.2023.10306762

Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants

Alessandro S. Savoia^*, Domenico Giustiniano, Carlo Prelini, Marta Saccher, Amin Rashidi, Alberto Leotti, Vasiliki Giagka, Marco Ferrera

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and integrated with an equivalent circuit model (ECM). The study considered different mechanical support scenarios, from rigidly clamped to completely free. These were numerically analyzed and validated by impedance measurements and acoustic power transfer experiments on PMUT prototypes. The results show that reducing the mass of the mechanical support increases the Q factor, leading to a significant improvement in power conversion efficiency, with an efficiency increase factor of 5.6x from the clamped to the free case. This approach can potentially enhance overall power conversion efficiency, reduce the need for matching networks, and enable miniaturization in ultrasonically powered implants.

Original language	English
Title of host publication	Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)
Place of Publication	Piscataway
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	979-8-3503-4645-9
ISBN (Print)	979-8-3503-4646-6
DOIs	https://doi.org/10.1109/IUS51837.2023.10306762
Publication status	Published - 2023
Event	2023 IEEE International Ultrasonics Symposium (IUS) - Montreal, Canada Duration: 3 Sept 2023 → 8 Sept 2023

Conference

Conference	2023 IEEE International Ultrasonics Symposium (IUS)
Abbreviated title	IUS 2023
Country/Territory	Canada
City	Montreal
Period	3/09/23 → 8/09/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

PMUT
Ultrasonic MEMS
PZT
Ultrasonic Powering
Biomedical Implants
Power Transfer

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10.1109/IUS51837.2023.10306762

Evaluating_the_Influence_of_PMUT_Mechanical_Support_Properties_on_Power_Conversion_Efficiency_in_Ultrasonically_Powered_ImplantsFinal published version, 2.69 MB

Cite this

Savoia, A. S., Giustiniano, D., Prelini, C., Saccher, M., Rashidi, A., Leotti, A., Giagka, V., & Ferrera, M. (2023). Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants. In Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS) IEEE. https://doi.org/10.1109/IUS51837.2023.10306762

@inproceedings{9becec0965584bc3b51468e6e957aab1,

title = "Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants",

abstract = "Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and integrated with an equivalent circuit model (ECM). The study considered different mechanical support scenarios, from rigidly clamped to completely free. These were numerically analyzed and validated by impedance measurements and acoustic power transfer experiments on PMUT prototypes. The results show that reducing the mass of the mechanical support increases the Q factor, leading to a significant improvement in power conversion efficiency, with an efficiency increase factor of 5.6x from the clamped to the free case. This approach can potentially enhance overall power conversion efficiency, reduce the need for matching networks, and enable miniaturization in ultrasonically powered implants.",

keywords = "PMUT, Ultrasonic MEMS, PZT, Ultrasonic Powering, Biomedical Implants, Power Transfer",

author = "Savoia, {Alessandro S.} and Domenico Giustiniano and Carlo Prelini and Marta Saccher and Amin Rashidi and Alberto Leotti and Vasiliki Giagka and Marco Ferrera",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2023 IEEE International Ultrasonics Symposium (IUS), IUS 2023 ; Conference date: 03-09-2023 Through 08-09-2023",

year = "2023",

doi = "10.1109/IUS51837.2023.10306762",

language = "English",

isbn = "979-8-3503-4646-6",

booktitle = "Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)",

publisher = "IEEE",

address = "United States",

}

Savoia, AS, Giustiniano, D, Prelini, C, Saccher, M, Rashidi, A, Leotti, A, Giagka, V & Ferrera, M 2023, Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants. in Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS). IEEE, Piscataway, 2023 IEEE International Ultrasonics Symposium (IUS), Montreal, Canada, 3/09/23. https://doi.org/10.1109/IUS51837.2023.10306762

Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants. / Savoia, Alessandro S.; Giustiniano, Domenico; Prelini, Carlo et al.
Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS). Piscataway: IEEE, 2023.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants

AU - Savoia, Alessandro S.

AU - Giustiniano, Domenico

AU - Prelini, Carlo

AU - Saccher, Marta

AU - Rashidi, Amin

AU - Leotti, Alberto

AU - Giagka, Vasiliki

AU - Ferrera, Marco

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2023

Y1 - 2023

N2 - Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and integrated with an equivalent circuit model (ECM). The study considered different mechanical support scenarios, from rigidly clamped to completely free. These were numerically analyzed and validated by impedance measurements and acoustic power transfer experiments on PMUT prototypes. The results show that reducing the mass of the mechanical support increases the Q factor, leading to a significant improvement in power conversion efficiency, with an efficiency increase factor of 5.6x from the clamped to the free case. This approach can potentially enhance overall power conversion efficiency, reduce the need for matching networks, and enable miniaturization in ultrasonically powered implants.

AB - Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and integrated with an equivalent circuit model (ECM). The study considered different mechanical support scenarios, from rigidly clamped to completely free. These were numerically analyzed and validated by impedance measurements and acoustic power transfer experiments on PMUT prototypes. The results show that reducing the mass of the mechanical support increases the Q factor, leading to a significant improvement in power conversion efficiency, with an efficiency increase factor of 5.6x from the clamped to the free case. This approach can potentially enhance overall power conversion efficiency, reduce the need for matching networks, and enable miniaturization in ultrasonically powered implants.

KW - PMUT

KW - Ultrasonic MEMS

KW - PZT

KW - Ultrasonic Powering

KW - Biomedical Implants

KW - Power Transfer

UR - http://www.scopus.com/inward/record.url?scp=85178638716&partnerID=8YFLogxK

U2 - 10.1109/IUS51837.2023.10306762

DO - 10.1109/IUS51837.2023.10306762

M3 - Conference contribution

SN - 979-8-3503-4646-6

BT - Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)

PB - IEEE

CY - Piscataway

T2 - 2023 IEEE International Ultrasonics Symposium (IUS)

Y2 - 3 September 2023 through 8 September 2023

ER -

Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants

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Keywords

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