@inproceedings{74a5c70d89e14974b3917937263bf125,
title = "Evaluation of al-doped SPE ultrashallow P+N junctions for use as PNP SiGe HBT emitters",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "Y Civale and G Lorito and C Xu and LK Nanver and {van der Toorn}, R",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-1737-7",
publisher = "IEEE",
pages = "97--100",
editor = "YL Jiang and XP Qu and GP Ru and BZ Li",
booktitle = "IEEE international workshop on junction technology",
address = "United States",
note = "IWJT 2008, Shanghai, China ; Conference date: 15-05-2008 Through 16-05-2008",
}