Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films

TMH Pham, CR de Boer, CCG Visser, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	889-893
Number of pages	5
Journal	Electrochemical Society. Journal
Volume	152
Issue number	11
DOIs	https://doi.org/doi:10.1149/1.2060693
Publication status	Published - 2005

Keywords

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title = "Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "TMH Pham and {de Boer}, CR and CCG Visser and PM Sarro",

year = "2005",

doi = "doi:10.1149/1.2060693",

language = "Undefined/Unknown",

volume = "152",

pages = "889--893",

journal = "Electrochemical Society. Journal",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

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}

TY - JOUR

T1 - Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films

AU - Pham, TMH

AU - de Boer, CR

AU - Visser, CCG

AU - Sarro, PM

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

U2 - doi:10.1149/1.2060693

DO - doi:10.1149/1.2060693

M3 - Article

SN - 0013-4651

VL - 152

SP - 889

EP - 893

JO - Electrochemical Society. Journal

JF - Electrochemical Society. Journal

IS - 11

ER -