@article{b030ae5f2d5c4ada97943aa9d9cfb23e,
title = "Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films",
keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",
author = "TMH Pham and \{de Boer\}, CR and CCG Visser and PM Sarro",
year = "2005",
doi = "doi:10.1149/1.2060693",
language = "Undefined/Unknown",
volume = "152",
pages = "889--893",
journal = "Electrochemical Society. Journal",
issn = "0013-4651",
publisher = "Institute of Physics",
number = "11",
}