Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

PFM Verhoeven, JF Jongste, GCAM Janssen, S Radelaar, M Lerme, O Demolliens

Research output: Book/Report › Report › Professional

Original language	English
Place of Publication	Delft
Publisher	Technische Universiteit Delft
Number of pages	17
Publication status	Published - 1996

Name
Publisher	Technsiche Universiteit Delft

Cite this

TY - BOOK

T1 - Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

AU - Verhoeven, PFM

AU - Jongste, JF

AU - Janssen, GCAM

AU - Radelaar, S

AU - Lerme, M

AU - Demolliens, O

PY - 1996

Y1 - 1996

M3 - Report

BT - Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

PB - Technische Universiteit Delft

CY - Delft

ER -