Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

PFM Verhoeven, JF Jongste, GCAM Janssen, S Radelaar, M Lerme, O Demolliens

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationDelft
    PublisherTechnsiche Universiteit Delft
    Number of pages17
    Publication statusPublished - 1996

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    PublisherTechnsiche Universiteit Delft

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