Evaluation of in-situ doped PECVD SiC thin films for surface micromachining

HMT Pham; CR de Boer; K Kwakernaak; WG Sloof; PM Sarro

Evaluation of in-situ doped PECVD SiC thin films for surface micromachining

HMT Pham, CR de Boer, K Kwakernaak, WG Sloof, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE2001: proceedings
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	856-860
Number of pages	5
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001
Event	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{b962c85f51ec4904b65eae5b27d4bc9d,

title = "Evaluation of in-situ doped PECVD SiC thin films for surface micromachining",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "HMT Pham and {de Boer}, CR and K Kwakernaak and WG Sloof and PM Sarro",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "856--860",

booktitle = "SAFE2001: proceedings",

note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",

}

Pham, HMT, de Boer, CR, Kwakernaak, K, Sloof, WG & Sarro, PM 2001, Evaluation of in-situ doped PECVD SiC thin films for surface micromachining. in SAFE2001: proceedings. STW Technology Foundation, Utrecht, pp. 856-860, Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven, 28/11/01.

TY - GEN

T1 - Evaluation of in-situ doped PECVD SiC thin films for surface micromachining

AU - Pham, HMT

AU - de Boer, CR

AU - Kwakernaak, K

AU - Sloof, WG

AU - Sarro, PM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 856

EP - 860

BT - SAFE2001: proceedings

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven

Y2 - 28 November 2001 through 30 November 2001

ER -