Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster.

K Hemmes, A Hamstra, KR Koops, MM Wind, T Schram, J de Laet, H Bender

    Research output: Contribution to journalArticleScientificpeer-review

    20 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)40-46
    Number of pages7
    JournalThin Solid Films
    Volume313
    Publication statusPublished - 1998

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