Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster.

K Hemmes, A Hamstra, KR Koops, MM Wind, T Schram, J de Laet, H Bender

Research output: Contribution to journal › Article › Scientific › peer-review

Cite this

@article{a34d30d4b4ce44449ae37133c151f18c,

title = "Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster.",

author = "K Hemmes and A Hamstra and KR Koops and MM Wind and T Schram and {de Laet}, J and H Bender",

year = "1998",

language = "Undefined/Unknown",

volume = "313",

pages = "40--46",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}